Dr. Paul L. Bergstrom


Notice for 2010–2011 Academic Year

Dr. Bergstrom will be on a sabbatical leave of absence from August 2010 through July 2011, conducting research on porous semiconductors with the University Graduate Center (UNIK) and the Institute for Energy Technology (IFE) in Kjeller, Norway. He is maintaining research efforts at MTU in several areas, but will not be available for interactions until Fall 2011. Please contact Dr. Daw Don Cheam, Postdoctoral Fellow and Instructor, for contact on research ongoing at Michigan Technological University during the year.


Porous Silicon Technologies enabling Integrated Sensors and Actuators

Nanoscaled Technologies enabling Nanoelectronic Devices

Technologies for the Monolithic Integration of Sensors and Actuators with Electronics


EE5480: Advanced MEMS

Integrated Microsystems Engineering Enterprise

Curricula Vitae

Microfabrication Facility

Multi Scale Technologies Institute

Center for Integrated Systems for Sensing Imaging and Communications

NSF Engineering Research Center for Wireless Integrated Microsystems


paulb at mtu.edu

Michigan Technological University

Department of Electrical and Computer Engineering

121 EERC Bldg.

1400 Townsend Dr.

Houghton Michigan 49931


50 Things About Me

    Dr. Bergstrom conducts research on the integration of nanoscaled technologies in complex microsystems. The research is focused in two areas: the physics and fabrication of devices and systems utilizing porous semiconductors, and the physics and fabrication of devices incorporating quantum scaled effects as long range extensions to mainstream VLSI CMOS technologies.

    Dr. Bergstrom is an Associate Professor of Electrical and Computer Engineering, an Adjunct Associate Professor of Materials Science and Engineering, the Associate Director of the Multi Scale Technologies Institute, and the Faculty Director of the Microfabrication Facility at MTU.

The image shows normal and cross sectional scanning electron micrographs of mesoporous silicon membranes formed in n- and p-type (100) silicon to explore the impact of process and doping on the optical properties of these oriented thick membrane structures after oxidation. This work was presented at the 2010 International Conference on Porous Semiconductors – Science and Technology in Valencia, Spain in March 2010 and is in print review.

Research exploring how quantum scale effects in nanomaterials can be integrated in very large scale electronic and sensing systems are a major theme of Dr. Bergstrom’s research efforts. The links at the right will direct to past and ongoing research endeavors in porous semiconductors, quantum dot based electronics, ferroic materials, and for research partnerships.


The photo at right shows a glimpse into Michigan Tech.’s Microfabrication Facility. The university has a modest fabrication capability for sample or wafer scale processing up to 150mm substrates of a wide variety of photonic, nanoscaled, bio-inspired, and microsystem research. This facility is part of a larger organization known as the Materials Characterization and Fabrication Facility.